Designing Heating Zones in a Mica Heater for Better Thermal Balance

https://smart-heating-solutions.zenbloomer.com/posts/wafer-heater-design-considerations-for-12-inch-semiconductor-wafers

In heated plates, a mica heater must deliver heat in a controlled way. It uses a resistive heating circuit supported and insulated by mica. One useful trait is high-temperature capability. Still, mechanical stress can change the result